LIP 481V / LIP 481U

Specifications

LIP 481 V

LIP 481 U

Areas of application

High vacuum, up to 1 · 10–7 mbar

Ultrahigh vacuum, up to 1 · 10–11 mbar

Measuring standard*

Coefficient of linear expansion

SUPRADUR phase grating on glass or Zerodur glass ceramic

Glass: αtherm  8 · 10–6 K–1; Zerodur glass ceramic: αtherm  (0 ± 0.1) · 10–6 K–1

Accuracy grade*

±1 µm, ±0.5 µm

Baseline error

≤ ±0.175 µm/5 mm

Measuring length ML* in mm

70 120 170 220 270 320 370 420

Reference marks

One at midpoint of measuring length

Output signals

  1 VPP

Signal period

2 µm

Cutoff frequency –3 dB

≥ 300 kHz

Traversing speed

36 m/min

Interpolation error

Position noise RMS

±7 nm

2 nm (450 kHz)

Supply voltage

Current consumption

DC 5 V ±5%

< 190 mA

Electrical connection

15-pin D-sub connector (male); interface electronics integrated in connector

Housing feed-through* (see page 4)

None (interface electronics in a vacuum)

D-sub connector (not included in delivery; interface electronics not in a vacuum)

Cable length of scanning head to APE*

0.5 m or 1 m

0.5 m or 1 m to the housing feed-through and 0.5 m to the APE

Other cable lengths on request, but ≤ 3 m between scanning head and APE

Cable length after APE

≤ 20 m (with HEIDENHAIN cable)

Vibration 55 Hz to 2000 Hz

Shock 11 ms

≤ 200 m/s2 (EN 60068-2-6)

≤ 500 m/s2 (EN 60068-2-27)

Operating temperature

0 °C to 40 °C

Baking temperature

100 °C

120 °C

Materials

PCB: Ceramic

Adhesives: UHV-compatible, temperature resistant

Mass Scanning head

Connector

Scale

Connecting cable

50 g (without cable)

32 g; with integrated interface electronics: 140 g

5.6 g + 0.2 g/mm measuring length

38 g/m

* Please select when ordering