High accuracy
High repeatability
Repeatability typically < 0.03 µm with 12 mm measuring range
Zerodur scale
Actuation by cable-type lifter
Ball-bearing guide
± 0.2 µm
MT 1200: < 0.03 µm
MT 2500: < 0.09 µm
± 0.5 µm system accuracy
Repeatability typically < 0.04 µm with 100 mm measuring range
Large measuring ranges
Ball-bearing guide with low friction
± 0.5 µm
MT 60: < 0.06 µm
MT 101: < 0.04 µm